Micro Electromechanical Sensors: Technology and Applications
نویسنده
چکیده
Micro Electromechanical Systems (MEMS) have been proved to be outstanding tools for micromachines. The current article is intended to produce an assessment of MEMS used in a wide scale in various spheres, nearly 30 years after their initial development.Conventional sensors are now aptly supported by advanced technologies. Micro Electromechanical Sensors form a class of sensors which are sensitive to the different mechanical properties of the microstructures involved. The tremendous growth of MEMS technology in smartphones, automobiles, and biosensors increases day by day and will experience fabulously over the next few years.
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